Abstract:Quartz resonant accelerometer has some advantages of strong anti-interference ability, quasi-digital output and simple integration, but temperature drift has become a pivotal factor restricting its stability. In this paper, the thermal stress generated inside the vibrating beam of the accelerometer is effectively suppressed by the all-quartz non-heterogeneous material design and the thermal stress isolation structure scheme. The sensitive component of sensor is composed of mass block, hinge, fixed base and microresonators, which are manufactured by quartz, while these two microresonators are arranged differentially to realize the compensation of the thermal stress inside the vibrating beam. The quadrilateral frame design of the microresonator can isolate the thermal stress generated in the surroundings from the vibrating beam. Topology design, applied on sensitive portion of fixed base, is carried out aiming to suppress the thermal stress transferring to the vibrating beam as well. This paper utilized the finite element simulation analysis of the quartz resonant accelerometer at full temperature. Within the range, when the ambient temperature reaches at 75 ℃, the thermal stress generated inside the vibrating beam is reduced by more than 99.41% after optimization.