With the development of terahertz (THz) technology, the advantages of the abundant spectrum resources and relatively wide bandwidth for the terahertz frequency band make THz frequency sources show a wide range of applications such as ultra-high-speed short-range wireless/wired communications, radar, medical, imaging, and remote sensing sensors. This paper summarizes the latest research results and problems encountered in silicon-based THz frequency sources, such as THz frequency multipliers, THz oscillators, THz antennas, THz radiator, and THz radiation arrays in the past two decades. At last, the development direction and future hot spots of silicon-based THz frequency sources are prospected.