This paper focuses on the information processing microsystem technologies based on Through Silicon Vias. Firstly, traditional information processing microsystem integrated implementation and development bottleneck under new demand are introduced, and relying on More than Moore strategy has become an important way to implement information processing microsystem with high density, multi function and more work pattern ability. All above requirements can be supported by TSV.The advantages of information processing microsystem and key technologies in design, realization and test are presented, and composition of various microsystem product have been showed at the same time. Finally, the application prospect of information processing microsystem products has been prospected with the advantages of key technologies to support the information processing microsystem.