Abstract:The multi-beam transmitting front-end proposed by phased-array mode is an important sub-system of low-orbit internet communication satellite due to its characteristics of flexible beam scanning and simultaneous communication of multi-targets. In this paper, several microwave monolithic integrated circuits (MMIC) and the passive structures, such as MEMS power divider crossover network, are integrated by using the silicon-based three-dimensional(3D) heterogeneous integration technology. A component of K-band 8 beam 32 channels tile transmitting array based on the MEMS technology is designed. The component consists of five layers of silicon module, and the different silicon modules are connected to each other with solder balls(including the golden ball and the SnPb ball). And the RF signal inside the silicon-based module is transmitted by the through silicon vias (TSV). The dimension of the component is about 16.25 mm×14.25 mm×6.3 mm. The test result shows that, in the range of 19 GHz~21 GHz, the transmit gain of each channel ≥18 dB, and the input and output VSWRs ≤2.0. The component also has the functions of 6 bit phase shift and 5 bit attenuation.