面向宇航应用光传输微系统集成技术
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西安微电子技术研究所 西安 710119

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TN491

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Optical transmission micro-system integration technology for aerospace applications
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1.Xi’an Microelectronics Institute,26 Information Avenue,Chang ’an District,Xi’an,710119;2.China

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    摘要:

    为了满足宇航系统对高速、宽带数据和图像传输产品小体积、轻质化的需求,研究光传输高速高密度集成技术。基板采用带状差分线设计和叠层组装工艺,提高集成密度、缩小体积提升了系统组装的空间,并通过建模仿真设计分析高速信号完整性;将光器件设计在外壳底板上,实现高效散热结构设计,同时提高了光器件使用可靠性;采用混合集成微组装工艺,硅转接基板实现芯片级三维立体集成,采用二次封装技术解决了光纤高效耦合与气密共实现的难题。微系统模块体积≤27 mm×24 mm×5 mm,气密封装漏率≤5×10–9Pa·m3/s(He)。

    Abstract:

    In order to meet the small size and light weight requirements of aerospace systems for high-speed and broadband data and image transmission products, this paper has developed an high-speed and high-density integration technology for optical transmission. The substrate adopts symmetrical strip difference line design, and laminated assembly to provide integration density and reduce volume. The high-speed signal integrity is analyzed through modeling and simulation. The optical device is innovatively designed on the bottom of the housing to achieve an efficient heat dissipation structure while improving the reliability of the optical device. By hybrid integrated micro-assembly technology , silicon interposer achieves chip-level three-dimension integration, and by multiple packaging technology,the problem of optical fiber coupling and sealing synchronization is also solved with the volume of the manufactured micro system module≤ 27 mm× 24 mm×5 mm, and the leak rate of the sealed package ≤ 5×10–9Pa.m3/s.

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高苏芳,陈龙飞,孙程程,仇轲,万欢欢,郑东飞.面向宇航应用光传输微系统集成技术[J].遥测遥控,2021,42(5):108-112.

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  • 收稿日期:2021-05-20
  • 最后修改日期:2021-09-13
  • 录用日期:2021-06-28
  • 在线发布日期: 2021-09-24
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  • 优先出版日期: 2021-09-24